School personnel information

写真b

Ito Tomoko


Mail Address

Mail Address

Organization 【 display / non-display

  • 2014.04.01 - 2016.03.31, Center for Atomic and Molecular Technologies, Graduate School of Engineering, Specially Appointed Researcher

  • 2016.04.01 - , Center for Atomic and Molecular Technologies, Graduate School of Engineering, Specially Appointed Researcher

 

Academic Papers 【 display / non-display

  • Etching yields and surface reactions of amorphous carbon by fluorocarbon ion irradiation, Kazuhiro Karahashi, Hu Li, Kentaro Yamada, Tomoko Ito, Satoshi Numazawa, Ken Machida, Kiyoshi Ishikawa, Satoshi Hamaguchi, 2017.05, Papers

  • Mass spectrometry analyses of ions generated by atmospheric-pressure plasma jets in ambient air, Tomoko Ito, Kensaku Gotou, Kanako Sekimoto, Satoshi Hamaguchi, Plasma Medicine,5(2–4) 283–298, 2015.12, Papers

  • Characterization of polymer layer formation during SiO2/SiN etching by fluoro/hydrofluorocarbon plasmas, Miyake Keita, Ito Tomoko, Isobe Michiro, Karahashi Kazuhiro, Fukasawa Masanaga, Nagahata Kazunori, Tatsumi Tetsuya, Hamaguchi Satoshi, JAPANESE JOURNAL OF APPLIED PHYSICS,53(3), 2014.03, Papers