School personnel information

写真b

KARAHASHI Kazuhiro


Organization 【 display / non-display

  • 2006.11.01 - 2007.03.31, Science and Technology Center for Atoms,Molecules and Ions Control, Graduate School of Engineering, Assistant Professor

  • 2007.04.01 - 2013.03.31, Science and Technology Center for Atoms,Molecules and Ions Control, Graduate School of Engineering, Assistant Professor

  • 2013.04.01 - 2013.04.15, Center for Atomic and Molecular Technologies, Graduate School of Engineering, Assistant Professor

  • 2013.04.16 - 2015.03.31, Center for Atomic and Molecular Technologies, Graduate School of Engineering, Assistant Professor

  • 2015.10.01 - 2016.03.31, Center for Atomic and Molecular Technologies, Graduate School of Engineering, Associate Professor

  • 2016.04.01 - , Center for Atomic and Molecular Technologies, Graduate School of Engineering, Specially Appointed Professor

 

Academic Papers 【 display / non-display

  • Numerical simulation of atomic-layer oxidation of silicon by oxygen gas cluster beams, Kohei Mizotani, Michiro Isobe, Kazuhiro Karahashi, and Satoshi Hamaguchi, Plasma and Fusion Research , 2015.09, Papers

  • Suboxide/subnitride formation on Ta masks during magnetic material etching by reactive plasmas, Hu Li, Yu Muraki, Kazuhiro Karahashi, and Satoshi Hamaguchi, 2015.04, Papers